Numerical simulation of vacuum-ultraviolet irradiation of dielectric layers

Vacuum-ultraviolet irradiation produces trapped charges in dielectrics. The trapped charges often generate self-consistent electric fields. A Monte Carlo simulation coupled with a Poisson equation solver is used to model the relationship between the irradiation photon flux and electrostatic potential. The simulation includes photoconduction, photoemission, photoinjection, and the effects of self-consistent electric fields. Calculations show that photoemission and photoinjection are responsible for changes in the electric potential as photon dose or dielectric thicknesses are varied. Experimental surface-potential measurements were made to compare the results of the simulation. © 2010 American Institute of Physics. doi:10.1063/1.3386531